Phantom RIE
original price: 0,00 EUR
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Basic Information
| Condition | new |
|---|---|
| Place of Origin | United States of America |
| Brand Name | Phantom RIE |
The Phantom RIE (Reactive Ion Etcher) is designed to supply research and failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using fluorine and oxygen based chemistries. The system has a compact, modular design built on a space-saving platform.
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