Tetrafluorkohlenstoff CF4

Carbon Tetrafluoride, CF4 is non-toxic, colourless gas,and used for refrigerate, gas insulate,fluridizer, Finishing Agent. Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon (CF4). It has a very high bond strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane. Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas. Tetrafluoromethane is sometimes used as a low temperature refrigerant. It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride. GradeSemicon 3N5ULSI 5NPurity,%99.9599.999Oxygen≤100ppmvNitrogen≤400ppmvAir≤5.0ppmvCarbon Dioxide≤10ppmv(+CO)≤1ppmvCarbon Monoxide≤20ppmvOther Halocarbons≤2.0ppmvWater≤10ppmv≤2.0ppmvSulfur Hexafluoride≤1.0ppmvAcidity as HF≤1.0ppmv