Schwefelhexafluorid SF6

Sulfur Hexafluoride (SF6) It is a colorless, tasteless, odorless, non-toxic, non- burning gas with very good stability, heat resistance, excellent electrical insulation and arcing characteristics. With excellent electric in sulating andarc-quenching capacity,SF6 has been widely used in the fields of power installations,laser,medicine,meteorology,refrigeration,fire-fighting,chenical industry,military engineering,aerospace,nonferrous metallurgy and physical research etc. Electronic SF6 is widely used in TFT-LCD,semiconductor and solar photoelectricity industy ect. It is a good cleaning gas and etching gas for plasma process. --------------------------------------------- PURITY 99.99% 99.999% Nitrogen < 20 ppm < 5 ppm Oxygen < 10 ppm < 3 ppm Total Hydrocarbons (as CH4) < 5 ppm < 1 ppm Halocaron 14 < 60 ppm < 5 ppm Water < 5 ppm < 3 ppm Hydrogen Fluoride < 0.1 ppm < 0.1 ppmValve Material Brass Brass--------------------------------------------- Molecular Weight: 146.05 Specific Volume: 2.65 cf/lb @NTP Boiling Point: -82.7 °F@ 1 Atm CAS No.: 2551-62-4 Hazards: Suffocation Safety Data: ACGIH - TLV: 1,000 ppm Vapor Pressure Data: Temp, Deg.F Pressure,psia 32 184.4 70 320