Halocarbon 14 (Tetrafluormethan) CF4

Terafluoromethane( CF4) CF4 also named Terafluoromethane or R14.It is a colorless, odorless, a slight ether flavor gas, non-inflamable noncorrosive gas with a slinght ether-like odor in air , relatively stable nontoxic substances. But in high temperature or with combustible gas combustion together, decompose a poisonous fluoride, has a mild hydrolysis reactions. CF4 is normally compressde and shipped at high pressure. It is an extremelystable compound,and widly used for etching polysilicon,silicon dioxide ,some metal silicides and metals . CF4 is also a cryogenic refrigerant,a good cleaning gas for waferas and chambers,and can be used as a insulant gas. ----------------------------------------------------------------------- PURITY ≥99.99% Nitrogen < 2 ppm Oxygen< 1 ppm Carbon Dioxide < 1 ppm Water < 1 ppm Carbon Monoxide < 1 ppm Acidity as HF < 1 ppmw Total Hydrocarbons < 1 ppm Other Halocarbons < 2 ppm --------------------------------------------- Molecular Weight: 88 Specific Volume: 4.39 cf/lb @NTP Boiling Point: -198.4°F@ 1 Atm CAS No.: 75-73-0 Hazards: High Pressure and Suffocation--------------------------------------------- UN Number: UN 1982 DOT Class: 2.2 --------------------------------------------- Packing cylinder