This generator uses 2.45GHz microwave to ionize the rarefied gas in the Φ50mm quartz cavity and form spherical plasma torch.Microwave plasma products can be applied to enterprises, factories. This generator not only can creat experimental course obout the knowledge of plasma,but also can do experiment such as chemical deposition of the plasma,etching etc.For the above experiments,they cansynthesis diamond film and other multi-function film.And it can also synthesis small size but super-scale IC. This generator consists of 3 systems:icrowave,vacuum and air supply,water-cooling.Quartz cavity microwave plasma generator.Product Name: Plasma generator. Size:1.4×1.5×0.6m3 Weight:100kg