box-type vacuum coater

A variety of precision optical film deposition, electrical membrane: Laser mirror, resin lens, cold light film, various filters, beam splitter, the sun protective film, antireflective coating, silicon coating and metal film. Vacuum chamber diameter: φ550-φ1800mm, material stainless steel Ultimate vacuum: 3 × 10 - value 4PA Recovery vacuum: 4 × 10 - 3Pa time ≤ 15 minutes Vacuum system: diffusion pump + Mechanical pump Baking temperature: 35adjustable control a variety of precision optical thin film deposition, membrane: Laser mirror, resin lens, cold light film, various filters, beam splitter, the sun protective film, anti-reflective coating, silicon coating and metal film. Vacuum chamber diameter: φ550-φ1800mm, stainless steel Ultimate Vacuum: 3 × 10 - value 4PA . Recovery vacuum: 4 × 10 - 3Pa time ≤ 15 minutes Vacuum system: diffusion pump + Mechanical pump Baking temperature: 350 adjustable control Evaporation Source: resistance evaporation / electron beam evaporation Thickness monitoring: optical monitoring / quartz crystal monitor Workpiece plate: a ball, flat, fan-shaped, matching the work of planetary disks Box-type structure: there are multiple back-hole evaporation chamber, to facilitate the conversion Modular design: the combination of modular, easy to maintain and repair electrical control can select special features such as: ion source, low pumps, molecular pumps, low-temperature trap and so on.. Box vacuum coating machine main technical data: Model ZZS550 ZZS660 ZZS700 ZZS800 ZZS900 ZZS1100 ZZS1300 ZZS1800 Vacuum chamber dimensions mm Φ550 × 680 Φ660 × 800 Φ700 × 850 Φ800 × 900 Φ900 × 1000 Φ1100 × 1300 Φ1300 × 1300 Φ1800 × 2000 Limit vacuum 3 × 10-4Pa Recovery vacuum 4 × 10-3Pa ≤ 15min Vacuum system configuration (manual / automatic) ZDFAutomatic Vacuum Controller ZDC type automatic pressure control device TK300 +2 X-15 TK400 +2 X-30 TK-500 +2 X-70 K600 +2 X-70 K600 +2 X-70 K630 + ZJ300 +2 X-70 K-800 + ZJ300 +2 X-70 2X-15 2 sets of K800 + ZJ600 + H150 Work Pieces Folder With a diameter of Φ500 Φ630 Φ640 Φ740 Φ840 Φ1020 Φ1220 Φ1700 Speed of 0-30rpm Bake on baking or under baking, the maximum temperature of 350 adjustable, stainless steel tubular heating element heater or bromine tungsten lamp. Steam Hair Source resistance of each of the two pairs of evaporation source 5KW / evaporation single-source alternative Beam evaporation source resistance EBS electronic gun; beam deflection angle 270 °, power 6KW-8KW Ion bombardment DC voltage 3KV, power 0.6KW. Thickness of the system wavelength range 380-800nm (standard), 9 ° through the reflection light path, six more films with electric display Equipment required pressure: ≥ 0.25Mpa water temperature: ≤ 25 air :0.4-0 .8 MPa Optical Vacuum Coating Machine Automatic control system: The embedded computer systems, control software, quartz crystal film thickness control device, optical film thickness control device such as standard control module unit. System function: the vacuum system operation control and display the work of the dynamic processes Baking temperature data and the curve shows Vacuum data and curves show Film thickness data and curves show Evaporation rate and functional data and the curve shows Coating Data Management Coating process automation Our company produces automatic Optical vacuum coating machines, automatic control with the quartz crystal film thickness and optical thickness control in two ways, through the PLC and the IPC of the entire coating process is the joint realization of the automatic controls, including vacuum systems , baking temperature, evaporation and film thickness monitoring functions, and can be recorded on the main process parameters to achieve a full computer unattended operation control. To improve work efficiency and ensure product quality stability and consistency According to machine, different technical disposition price has difference.