Anhydrous Hydrogen Chloride Liquid (5.0N) - VLSI Grade for Semiconductor

Anhydrous Hydrogen Chloride (HCl) Liquid (CAS No.: 7647-01-0; UN No.: 1050) is a high-purity liquefied gas supplied in dedicated steel cylinders, engineered for VLSI (Very Large Scale Integration) semiconductor manufacturing. It exhibits strong water-corrosiveness, a pungent odor, and inhalation toxicity, with a shelf-life of 2 years. Key Applications: Critical for large-scale integrated circuit production processes, including vapor phase polishing of epitaxial wafers and etching of epitaxial substrates. Safety & Handling: Classified as a corrosive substance (National Hazard Class: 2.3). Occupational Exposure Limit (MAC): 7.5mg/m³. Always use appropriate personal protective equipment (PPE) and follow strict safety protocols. Manufacturer emergency phone: 0532-68081808. Packaging & Specifications: Steel Cylinders: HCl-dedicated cylinders with filling capacities of 25kg, 250kg, or 660kg; cylinder pressure: 4.2MPa (at 20℃). Valves: Options include diaphragm type or plug-diaphragm type; interfaces: CGA330 / DISS634 / DIN-8; valve body material: corrosion-resistant 316L stainless steel. Grade & Purity: VLSI grade with purity ≥99.999%, ensured by batch inspection.