вакуум тестирование устройства

1, the equipment consists of: DM3000 experimental setup utility vacuum from a vacuum unit, glass Bell, discharge, instrumentation and control circuit, water cooling, bringing six parts. (1) The vacuum unit is a mechanical pump and diffusion pump oil glass consisting of two vacuum pumping system (2) Glass Bell built mobile electrode evaporation, vacuum evaporation method to be completed thin film deposition, can also be used for the vacuum environment of the electrical properties of thin film materials testing, such as: semiconductor thin film materials I-V characteristics of the test, etc.; (3) low vacuum discharge tube for the completion of the phenomenon of gas discharge experiments; (4) The instrument includes a vacuum measuring instruments, control display and instrument evaporation, discharge display and control instruments; (5) circuit includes a vacuum unit, evaporation process, discharge process control, alarm function of four parts water; (6) self-cooling refrigeration cycle. 2, the experimental elements: The experimental device is designed for high vacuum phenomenon secondary institutions an ideal experimental apparatus, through the metal-coatedthe following purposes: to obtain and master the vacuum measurement, vacuum evaporation coating of the principles and methods of operation; low vacuum such as gas discharge experiments, familiar with the metal and glass cleaning technology in general; understanding of film thickness measurement of the optical interferometry method. 3, apparatus features: (1) the traditional vacuum experimental apparatus composed of mostly metal parts, many of the major physical process is not visible, students can only understand the physical processes through the instrument. Experimental setup of the main part of a vacuum high-strength glass manufacturing, the process of intuitive physics, apparatus structured, flexible and easy to operate, and enhance the knowledge of students interested in their students, and enhance the experimental capabilities and the ability to integrate theory with practice. (2) rotary vane pump in the exhaust process, the suspension was pumping gas in the oil droplets to be discharged together with the gas. Therefore, the outlet pump often see "mist", but also a small amount of oil vapor to be discharged directly pollute the air and damage the health of the experimental staff. With the requirements of environmental protection and improvement of fuel efficiency, the experimental vacuum rotary vane vacuum pump device exhaust gas separation device erect. By testing gas emissions in the oil droplets in the diameter of about 0.01 0.8μm, such a small droplet can not be woven net filters in general, so the use of filters made of special polymer of oil mist filter, oil and gas to achieve separation, which must be porous enough to absorb small oil mist, oil mist filter element placed cylinder separator, and was discharged from the pump outlet of the gas entering the separator through the gas filter element to reach the export filter, the oil and gas purification. Oil in the separator was collected at the same time can be collected back to back to the fuel pump, so as to achieve the effect of fuel-efficient. The use of oil mist filter flange connection, compact structure, can quickly connect with the pump, and the use of secondary capture, collision between the first level is the cover, to collect the larger droplets, the second-level filters use a special collection of small oil droplets and oil mist. Maintenance is extremely easy to use. In order to use the security, there is an internal over-voltage devices, the use of a termination when the pump and I, yellow on one end of the row the atmosphere, are not allowed to reverse. (3) bring their own water cooling system Experimental equipment vacuum oil diffusion pump to cool the water, and to achieve vacuum experiments take time, and a simple long flowing out of tune with reality, water is the development of human reproduction, "Noah's Ark", water resources are limited, water conservation, water awareness and care of water is more of a sense of crisis, we put forward a serious topic. Response to the increasing lack of water, bring their own water cycle refrigeration system as a device in this experiment a bright spot! (4) the water alarm functions to improve the experimental setup is another feature of the flow sensor at all times to monitor the glass water-cooled oil diffusion pump of the normal working conditions for the normal use of experimental devices and vacuum the successful completion of the experiment to provide strong protection. 4. Technical parameters and characteristics 1) Working voltage: AC220V ± 5% 50HZ 2) machine power: 3000W 4) Weight: about 260Kg 5) Dimensions (mm): the vacuum system: a long 650 × width 560 × high-1460 Electric control system: a long 560 × width 560 × high-1480 6) vacuum chamber vacuum limit: 1.0 × 10-2Pa 7) evaporation current adjustment range: 0 150A 8) discharge tube voltage: 0 1500V 9) discharge current measurement range: 200μA 200mA