Кремний Основные печи

Product introductionBYJ-GX06 type silicon core furnace is an electron special apparatus for drawing silicon core from polycrystalline silicon rod by a zone melting method and a high-frequency induction heating way. This furnace can steadily control the silicon core with a diameter of 6-10 mm; every furnace can draw six silicon cores. The furnace comprises: a temperature automatic control system and a motor speed control system; relative parameters of each pulled crystal comprising data such as silicon core lift, rotational speed of crucible shaft, speed for lifting the crucible, and furnace pressure can be displayed on a touching screen. Main technical parametersEach of the main technical parameters in this type is as follows:1. Finished silicon core diameter (Φ6-10)×2100 2800mm 2. Raw silicon rod diameter (Φ40-55)×600 3. Numbers drawn by each furnace 6 4. Upper furnace chamber size Φ340×2353mm 5. Lower furnace chamber size Φ340×1242mm 6. Upper furnace gate effective size 212×626mm 7. Lower furnace gate effective size 220×1040mm 8. Lower furnace gate observation window effective size 130×280mm 9. Upper shaft effective travel 2300mm 10. Lower shaft effective travel 630mm 11. Upper shaft rapid lift/fall speed 100-1800mm/min 12. Upper shaft working lift/fall speed 0.1-60mm/min 13. Lower shaft rapid lift/fall speed 100-200mm/min 14. Lower shaft working lift/fall speed 0.02-10mm/min Crucible lifting creep (lifting speed is 0.02mm/min) ≤0.01mm Crucible shaft circular run-out ≤0.05mm 15. Lower shaft working rotating speed 1-60rpm 16. High-frequency power source oscillating frequency 2-2.5MHz 17. Total power 60KW 18. The highest heating temperature 1600°c 19. Vacuum ≤3Pa 20. Cooling water consumption: ≥8m3/h Cooling water pressure: 1.0 2.2Kg/cm2 Water inlet temperature: 10 25°c 21. Argon pressure: ≤0.12MPa 22. Vacuum pump: 2XZ-8 rotary vane pump 23. Overall dimension (L x W x H): 1885×1092×5369